SPECIALTY GAS PRODUCTS
Electronic Gas
High-purity electronic specialty gases for semiconductor, electronics, photovoltaic and advanced manufacturing processes.
ELECTRONIC SPECIALTY GAS
Electronic Gas Product Range
Electronic specialty gases are available in multiple purity levels, cylinder specifications and valve configurations for demanding manufacturing applications.
WF6
Tungsten Hexafluoride
ELECTRONIC GAS · 01
Tungsten Hexafluoride
六氟化钨
Purity
5N
Cylinder
10L / 47L
Valve
CGA638
NF3
Nitrogen Trifluoride
SF6
Sulfur Hexafluoride
ELECTRONIC GAS · 03
Sulfur Hexafluoride
六氟化硫
Purity
4N / 5N
Cylinder
40L / 47L
Valve
G5/8 / CGA590
CF4
Tetrafluoromethane
SiH4
Silane
NH3
Ammonia
ELECTRONIC GAS · 06
Ammonia
氨气
Purity
5N / 6N / 7N
Cylinder
40L / 47L
Valve
CGA660 / DISS720
N2O
Nitrous Oxide
ELECTRONIC GAS · 07
Nitrous Oxide
笑气
Purity
3N / 5N5
Cylinder
40L / 47L / 50L
Valve
G5/8 / DISS712
HCl
Hydrogen Chloride
ELECTRONIC GAS · 08
Hydrogen Chloride
氯化氢
Purity
3N / 5N
Cylinder
40L / 47L
Valve
CGA330 / DISS634 / DIN8
Cl2
Chlorine
C4F8
Octafluorocyclobutane
ELECTRONIC GAS · 10
Octafluorocyclobutane
八氟环丁烷
Purity
5N
Cylinder
47L
Valve
CGA660 / DISS716
C2F6
Hexafluoroethane
ELECTRONIC GAS · 11
Hexafluoroethane
六氟乙烷
Purity
5N
Cylinder
47L
Valve
CGA660 / DISS716
HBr
Hydrogen Bromide