Disilane Mixed Gas
Customizable disilane-containing gas mixtures with selectable concentration, balance gas, cylinder and supply configurations.
Disilane Mixed Gas
Disilane Mixed Gas is available with a Si₂H₆ concentration range from 5 ppm to 2%. Balance gas options include Ar, N₂, He and H₂. Composition and concentration can be configured according to customer requirements.
Customizable Disilane Gas Mixture
Disilane Mixed Gas is supplied as a controlled gas mixture containing Si₂H₆, with a concentration range from 5 ppm to 2%.
Available balance gases include argon, nitrogen, helium and hydrogen. Composition and concentration range can be configured according to different customer requirements.
Available cylinder volumes range from 0.7 L to 47 L, with a pressure specification of 5 MPa or above.
| Product Name | Disilane Mixed Gas |
|---|---|
| Chinese Name | 乙硅烷混合气体 |
| Main Component | Si₂H₆ |
| Concentration Range | 5ppm–2% |
| Balance Gas | Ar / N₂ / He / H₂ |
| Pressure | ≥5 MPa |
| Cylinder Volume | 0.7–47 L |
| Valve | Can be supplied according to customer requirements |
| Custom Configuration | Composition and concentration range can be configured according to different requirements. |
Disilane Mixed Gas can be configured according to required Si₂H₆ concentration, balance gas, cylinder volume, pressure and valve requirements.
Concentration
Si₂H₆ concentration range: 5ppm–2%.
Balance Gas
Available options: Ar, N₂, He and H₂.
Cylinder & Pressure
0.7–47 L cylinder volume with pressure of 5 MPa or above.
Valve
Valve configuration can be supplied according to customer requirements.
Need a Custom Disilane Mixed Gas?
Tell us your required Si₂H₆ concentration, balance gas, cylinder volume, pressure and supply configuration.